Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond
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| Date: | 2020 |
|---|---|
| Main Authors: | B. Deng, Ts. Vej, M. Ji, I. Luo, L. Li, K. Chzhou, L. Ma |
| Format: | Article |
| Language: | English |
| Published: |
2020
|
| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001130384 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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