Hybrid systems for electron beam evaporation and ion sputtering

Hybrid systems for electron beam evaporation and ion sputtering

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Bibliographische Detailangaben
Datum:	2019
Hauptverfasser:	A. I. Kuzmichev, A. I. Ustinov, A. E. Rudenko, I. M. Drozd
Format:	Artikel
Sprache:	English
Veröffentlicht:	2019
Schriftenreihe:	Electrometallurgy Today
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0001079866
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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