Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target

Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target

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Bibliographic Details
Date:2019
Main Authors: A. A. Onoprienko, V. I. Ivashchenko, A. O. Kozak, A. K. Sinelnichenko, T. V. Tomila
Format: Article
Language:English
Published: 2019
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001294418
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-25494
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spelling open-sciencenbuvgovua-254942024-02-26T22:33:24Z Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila 0203-3119 2019 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001294418 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
A. A. Onoprienko
V. I. Ivashchenko
A. O. Kozak
A. K. Sinelnichenko
T. V. Tomila
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
format Article
author A. A. Onoprienko
V. I. Ivashchenko
A. O. Kozak
A. K. Sinelnichenko
T. V. Tomila
author_facet A. A. Onoprienko
V. I. Ivashchenko
A. O. Kozak
A. K. Sinelnichenko
T. V. Tomila
author_sort A. A. Onoprienko
title Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
title_short Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
title_full Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
title_fullStr Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
title_full_unstemmed Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
title_sort deposition and characterization of thin si–b–c–n films by dc reactive magnetron sputtering of composed si/b4c target
publishDate 2019
url http://jnas.nbuv.gov.ua/article/UJRN-0001294418
work_keys_str_mv AT aaonoprienko depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget
AT viivashchenko depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget
AT aokozak depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget
AT aksinelnichenko depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget
AT tvtomila depositionandcharacterizationofthinsibcnfilmsbydcreactivemagnetronsputteringofcomposedsib4ctarget
first_indexed 2025-07-17T14:32:58Z
last_indexed 2025-07-17T14:32:58Z
_version_ 1850413762877587456

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