Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
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| Date: | 2019 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2019
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001294418 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859507791224373248 |
|---|---|
| author | A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila |
| author_facet | A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila |
| author_sort | A. A. Onoprienko |
| collection | Open-Science |
| first_indexed | 2025-07-17T14:32:58Z |
| format | Article |
| id | open-sciencenbuvgovua-25494 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T14:32:58Z |
| publishDate | 2019 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-254942024-02-26T22:33:24Z Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila 0203-3119 2019 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001294418 Article |
| spellingShingle | Superhard Materials A. A. Onoprienko V. I. Ivashchenko A. O. Kozak A. K. Sinelnichenko T. V. Tomila Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title | Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_full | Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_fullStr | Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_full_unstemmed | Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_short | Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target |
| title_sort | deposition and characterization of thin si–b–c–n films by dc reactive magnetron sputtering of composed si/b4c target |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001294418 |
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