Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
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| Date: | 2019 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2019
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001294418 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |