Cover Image

Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target

Saved in:

Bibliographic Details
Date:	2019
Main Authors:	A. A. Onoprienko, V. I. Ivashchenko, A. O. Kozak, A. K. Sinelnichenko, T. V. Tomila
Format:	Article
Language:	English
Published:	2019
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001294418
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS

Similar Items

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B₄C target
by: Onoprienko, A.A., et al.
Published: (2015)

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
by: A. A. Onoprienko, et al.
Published: (2015)

Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
by: A. O. Kozak, et al.
Published: (2020)

Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films
by: Onoprienko, A.A., et al.
Published: (2006)

Influence of nitrogen on the microstructure, hardness and tribological properties of Cr–Ni–B–C–N films deposited by DC magnetron sputtering
by: O. O. Onopriienko, et al.
Published: (2020)

Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
by: A. O. Kozak, et al.
Published: (2015)

Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60
by: M. V. Maleev, et al.
Published: (2015)

Deposition of the stoichiometric coatings by reactive magnetron sputtering
by: Sagalovych, A., et al.
Published: (2012)

Deposition of the stoichiometric coatings by reactive magnetron sputtering
by: A. Sagalovych, et al.
Published: (2012)

Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
by: I. N. Torianik, et al.
Published: (2013)

Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
by: Zayats, M.S., et al.
Published: (2010)

The influence of B3Si on the structure and properties of B4C ceramics
by: P. V. Mazur, et al.
Published: (2023)

Partial quasibinary eutectic in the system B4C−SiC
by: D. A. Zakarjan
Published: (2015)

Low-Temperature Synthesis and Structure of Hybrid Ni@C Nanomaterials Fabricated by Method of Reactive Magnetron Sputtering
by: M. I. Mokhnenko, et al.
Published: (2015)

Development of arc suppression technique for reactive magnetron sputtering
by: S. V. Dudin, et al.
Published: (2005)

Synthesis of TiO₂ different phase by DC magnetron sputtering
by: Dobrovolskiy, A., et al.
Published: (2014)

Частичная квазибинарная эвтектика в системе B₄C−SiC
by: Закарян, Д.А.
Published: (2015)

Plasma assisted deposition of TaB₂ coatings by magnetron sputtering system
by: Yakovin, S., et al.
Published: (2017)

Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
by: V. A. Sevrjukova, et al.
Published: (2011)

Magnetron sputtered coatings of AlN-TiCrB₂ system
by: Panasyuk, A.D., et al.
Published: (2009)

Structure and phase composition of ZrB2-SiC-AlN plasma coatings on the surfae of C/C-SiC composite materials
by: Ju. S. Borisov, et al.
Published: (2019)

Structure and Photocatalytic Properties of Titania Nanofilms Deposited by Reactive Magnetron Sputtering
by: A. A. Goncharov, et al.
Published: (2014)

Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering
by: Yakovin, S., et al.
Published: (2016)

Chemical composition and light emission properties of Si-rich-SiOx layers prepared by magnetron sputtering
by: Khomenkova, L., et al.
Published: (2007)

Первопринципный расчет оптических спектров кристаллообразующих кластеров C₄₈, B₂₄N₂₄, Si₂₄C₂₄
by: Овсянникова, Л.И., et al.
Published: (2008)

Directionally a crystallized ternary eutectic composite of the B4C–TaB2–SiC system
by: M. I. Upatov, et al.
Published: (2022)

Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
by: A. Rahmati, et al.
Published: (2012)

Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
by: A. Rahmati, et al.
Published: (2012)

Structure and properties of sputtered powder of the eutectic B4C – TiB2 alloy
by: P. I. Loboda, et al.
Published: (2015)

Structure and properties of directionally solidified alloy of B4–NbB2–SiC system
by: M. I. Upatov, et al.
Published: (2020)

Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering
by: Latyshev, V.M., et al.
Published: (2017)

The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
by: M. V. Maleev, et al.
Published: (2015)

Coatings properties Cr-Si-B-MgC2 in high conditions temperatures
by: V. V. Shchepetov, et al.
Published: (2022)

Coatings properties Cr-Si-B-MgC2 in high conditions temperatures
by: Shchepetov , Vitalii, et al.
Published: (2022)

Intrinsic defects in nonstoichiometric b-SiC nanoparticles studied by pulsed magnetic resonance methods
by: D. V. Savchenko, et al.
Published: (2010)

Flux pinning and vortex dynamics in MgB₂ doped with TiO₂ and SiC inclusions
by: Prokhorov, V.G., et al.
Published: (2009)

Atomic and electronic structure of a-SiC
by: Ivashchenko, V.I., et al.
Published: (2002)

Reaction 14C(11B, 12C)13B at Elab(11B) = 45 MeV, interaction of 13B + 12C versus that of 10,11,12B + 12C
by: Yu. Mezhevych, et al.
Published: (2022)

Дослідження контактної взаємодії TiB2—SiC зі сплавами Ni—Cr
by: Уманський, О.П., et al.
Published: (2008)

Властивості покриттів Cr–Si–B–MgC2 в умовах підвищенних температур
by: Shchepetov , Vitalii, et al.
Published: (2022)