Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist

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Bibliographic Details
Date:2018
Main Authors: P. M. Lytvyn, S. V. Malyuta, I. Z. Indutnyi, A. A. Efremov, O. V. Slobodyan, V. I. Minko, A. N. Nazarov, O. V. Borysov, I. V. Prokopenko
Format: Article
Language:English
Published: 2018
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000899772
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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-277502024-02-27T21:48:51Z Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist P. M. Lytvyn S. V. Malyuta I. Z. Indutnyi A. A. Efremov O. V. Slobodyan V. I. Minko A. N. Nazarov O. V. Borysov I. V. Prokopenko 1560-8034 2018 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000899772 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
P. M. Lytvyn
S. V. Malyuta
I. Z. Indutnyi
A. A. Efremov
O. V. Slobodyan
V. I. Minko
A. N. Nazarov
O. V. Borysov
I. V. Prokopenko
Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
format Article
author P. M. Lytvyn
S. V. Malyuta
I. Z. Indutnyi
A. A. Efremov
O. V. Slobodyan
V. I. Minko
A. N. Nazarov
O. V. Borysov
I. V. Prokopenko
author_facet P. M. Lytvyn
S. V. Malyuta
I. Z. Indutnyi
A. A. Efremov
O. V. Slobodyan
V. I. Minko
A. N. Nazarov
O. V. Borysov
I. V. Prokopenko
author_sort P. M. Lytvyn
title Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
title_short Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
title_full Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
title_fullStr Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
title_full_unstemmed Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
title_sort features of mechanical scanning probe lithography on graphene oxide and as(ge)se chalcogenide resist
publishDate 2018
url http://jnas.nbuv.gov.ua/article/UJRN-0000899772
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first_indexed 2025-07-17T15:04:32Z
last_indexed 2025-07-17T15:04:32Z
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