Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
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| Datum: | 2018 |
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| Format: | Artikel |
| Sprache: | English |
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2018
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000899772 |
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open-sciencenbuvgovua-277502024-02-27T21:48:51Z Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist P. M. Lytvyn S. V. Malyuta I. Z. Indutnyi A. A. Efremov O. V. Slobodyan V. I. Minko A. N. Nazarov O. V. Borysov I. V. Prokopenko 1560-8034 2018 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000899772 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics P. M. Lytvyn S. V. Malyuta I. Z. Indutnyi A. A. Efremov O. V. Slobodyan V. I. Minko A. N. Nazarov O. V. Borysov I. V. Prokopenko Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
| format |
Article |
| author |
P. M. Lytvyn S. V. Malyuta I. Z. Indutnyi A. A. Efremov O. V. Slobodyan V. I. Minko A. N. Nazarov O. V. Borysov I. V. Prokopenko |
| author_facet |
P. M. Lytvyn S. V. Malyuta I. Z. Indutnyi A. A. Efremov O. V. Slobodyan V. I. Minko A. N. Nazarov O. V. Borysov I. V. Prokopenko |
| author_sort |
P. M. Lytvyn |
| title |
Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
| title_short |
Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
| title_full |
Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
| title_fullStr |
Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
| title_full_unstemmed |
Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist |
| title_sort |
features of mechanical scanning probe lithography on graphene oxide and as(ge)se chalcogenide resist |
| publishDate |
2018 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000899772 |
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2025-07-17T15:04:32Z |
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