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Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum

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Bibliographic Details
Date:	2018
Main Authors:	Yu. D. Filatov, V. I. Sydorko, S. V. Kovalov, V. A. Kovalov, Ya. Yurchyshyn, M. A. Danylchenko, A. H. Vietrov
Format:	Article
Language:	English
Published:	2018
Series:	Tooling materials science
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001084537
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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