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Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method

Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method

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Bibliographic Details
Main Authors: K. A. Lukin, D. N. Tatjanko, A. B. Pikh, O. V. Zemljanyj
Format: Article
Language:English
Published: 2017
Series:Radiophysics and Electronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000685034
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Internet

http://jnas.nbuv.gov.ua/article/UJRN-0000685034

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