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Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method

Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method

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Bibliographic Details
Main Authors: K. A. Lukin, D. N. Tatjanko, A. B. Pikh, O. V. Zemljanyj
Format: Article
Language:English
Published: 2017
Series:Radiophysics and Electronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000685034
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spelling open-sciencenbuvgovua-355742024-02-29T11:28:00Z Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method K. A. Lukin D. N. Tatjanko A. B. Pikh O. V. Zemljanyj 1028-821X 2017 en Radiophysics and Electronics http://jnas.nbuv.gov.ua/article/UJRN-0000685034 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Radiophysics and Electronics
spellingShingle Radiophysics and Electronics
K. A. Lukin
D. N. Tatjanko
A. B. Pikh
O. V. Zemljanyj
Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
format Article
author K. A. Lukin
D. N. Tatjanko
A. B. Pikh
O. V. Zemljanyj
author_facet K. A. Lukin
D. N. Tatjanko
A. B. Pikh
O. V. Zemljanyj
author_sort K. A. Lukin
title Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
title_short Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
title_full Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
title_fullStr Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
title_full_unstemmed Measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
title_sort measurement of thicknesses of optically transparent layered structures by the spectral interferometry method
publishDate 2017
url http://jnas.nbuv.gov.ua/article/UJRN-0000685034
work_keys_str_mv AT kalukin measurementofthicknessesofopticallytransparentlayeredstructuresbythespectralinterferometrymethod
AT dntatjanko measurementofthicknessesofopticallytransparentlayeredstructuresbythespectralinterferometrymethod
AT abpikh measurementofthicknessesofopticallytransparentlayeredstructuresbythespectralinterferometrymethod
AT ovzemljanyj measurementofthicknessesofopticallytransparentlayeredstructuresbythespectralinterferometrymethod
first_indexed 2024-03-30T08:56:36Z
last_indexed 2024-03-30T08:56:36Z
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