Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing

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Бібліографічні деталі
Дата:2017
Автори: O. O. Havryliuk, Yu. Semchuk
Формат: Стаття
Мова:English
Опубліковано: 2017
Назва видання:Chemistry, physics and technology of surface
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000687484
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-357022024-02-29T11:28:26Z Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing O. O. Havryliuk Yu. Semchuk 2079-1704 2017 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000687484 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Chemistry, physics and technology of surface
spellingShingle Chemistry, physics and technology of surface
O. O. Havryliuk
Yu. Semchuk
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
format Article
author O. O. Havryliuk
Yu. Semchuk
author_facet O. O. Havryliuk
Yu. Semchuk
author_sort O. O. Havryliuk
title Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_short Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_full Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_fullStr Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_full_unstemmed Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_sort theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
publishDate 2017
url http://jnas.nbuv.gov.ua/article/UJRN-0000687484
work_keys_str_mv AT oohavryliuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing
AT yusemchuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing
first_indexed 2024-03-30T08:57:12Z
last_indexed 2024-03-30T08:57:12Z
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