Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing

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Datum:2017
Hauptverfasser: O. O. Havryliuk, Yu. Semchuk
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2017
Schriftenreihe:Chemistry, physics and technology of surface
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000687484
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author O. O. Havryliuk
Yu. Semchuk
author_facet O. O. Havryliuk
Yu. Semchuk
author_sort O. O. Havryliuk
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institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
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series Chemistry, physics and technology of surface
spelling open-sciencenbuvgovua-357022024-02-29T11:28:26Z Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing O. O. Havryliuk Yu. Semchuk 2079-1704 2017 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000687484 Article
spellingShingle Chemistry, physics and technology of surface
O. O. Havryliuk
Yu. Semchuk
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_full Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_fullStr Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_full_unstemmed Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_short Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
title_sort theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
url http://jnas.nbuv.gov.ua/article/UJRN-0000687484
work_keys_str_mv AT oohavryliuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing
AT yusemchuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing