Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
Збережено в:
Дата: | 2017 |
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Автори: | , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2017
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Назва видання: | Chemistry, physics and technology of surface |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000687484 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-357022024-02-29T11:28:26Z Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing O. O. Havryliuk Yu. Semchuk 2079-1704 2017 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000687484 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Chemistry, physics and technology of surface |
spellingShingle |
Chemistry, physics and technology of surface O. O. Havryliuk Yu. Semchuk Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
format |
Article |
author |
O. O. Havryliuk Yu. Semchuk |
author_facet |
O. O. Havryliuk Yu. Semchuk |
author_sort |
O. O. Havryliuk |
title |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
title_short |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
title_full |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
title_fullStr |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
title_full_unstemmed |
Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
title_sort |
theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
publishDate |
2017 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000687484 |
work_keys_str_mv |
AT oohavryliuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing AT yusemchuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing |
first_indexed |
2024-03-30T08:57:12Z |
last_indexed |
2024-03-30T08:57:12Z |
_version_ |
1796880996796203008 |