Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing
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| Date: | 2017 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2017
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| Series: | Chemistry, physics and technology of surface |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000687484 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859508932964253696 |
|---|---|
| author | O. O. Havryliuk Yu. Semchuk |
| author_facet | O. O. Havryliuk Yu. Semchuk |
| author_sort | O. O. Havryliuk |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:00:11Z |
| format | Article |
| id | open-sciencenbuvgovua-35702 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:00:11Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Chemistry, physics and technology of surface |
| spelling | open-sciencenbuvgovua-357022024-02-29T11:28:26Z Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing O. O. Havryliuk Yu. Semchuk 2079-1704 2017 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000687484 Article |
| spellingShingle | Chemistry, physics and technology of surface O. O. Havryliuk Yu. Semchuk Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title | Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_full | Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_fullStr | Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_full_unstemmed | Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_short | Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| title_sort | theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000687484 |
| work_keys_str_mv | AT oohavryliuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing AT yusemchuk theoreticalevaluationofthetemperaturefielddistributioninthesiliconperiodicnanostructuresduringthermalannealing |