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Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing

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Bibliographic Details
Date:	2017
Main Authors:	O. O. Havryliuk, Yu. Semchuk
Format:	Article
Language:	English
Published:	2017
Series:	Chemistry, physics and technology of surface
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000687484
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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