Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation
Збережено в:
| Дата: | 2017 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2017
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| Назва видання: | Nuclear physics and atomic energy |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000745612 |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-37392 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-373922024-02-29T11:36:56Z Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation V. Y. Suhakov A. A. Cherniuk 1818-331X 2017 en Nuclear physics and atomic energy http://jnas.nbuv.gov.ua/article/UJRN-0000745612 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Nuclear physics and atomic energy |
| spellingShingle |
Nuclear physics and atomic energy V. Y. Suhakov A. A. Cherniuk Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| format |
Article |
| author |
V. Y. Suhakov A. A. Cherniuk |
| author_facet |
V. Y. Suhakov A. A. Cherniuk |
| author_sort |
V. Y. Suhakov |
| title |
Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_short |
Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_full |
Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_fullStr |
Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_full_unstemmed |
Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_sort |
distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| publishDate |
2017 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000745612 |
| work_keys_str_mv |
AT vysuhakov distributionofconcentrationofimpuritiesandquotimpurityvacancyquotcomplexesbeyondtherangeofionsduringimplantation AT aacherniuk distributionofconcentrationofimpuritiesandquotimpurityvacancyquotcomplexesbeyondtherangeofionsduringimplantation |
| first_indexed |
2024-03-30T09:05:40Z |
| last_indexed |
2024-03-30T09:05:40Z |
| _version_ |
1796881173313486848 |