Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation
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| Date: | 2017 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2017
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| Series: | Nuclear physics and atomic energy |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000745612 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859509250281177088 |
|---|---|
| author | V. Y. Suhakov A. A. Cherniuk |
| author_facet | V. Y. Suhakov A. A. Cherniuk |
| author_sort | V. Y. Suhakov |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:35:35Z |
| format | Article |
| id | open-sciencenbuvgovua-37392 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:35:35Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Nuclear physics and atomic energy |
| spelling | open-sciencenbuvgovua-373922024-02-29T11:36:56Z Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation V. Y. Suhakov A. A. Cherniuk 1818-331X 2017 en Nuclear physics and atomic energy http://jnas.nbuv.gov.ua/article/UJRN-0000745612 Article |
| spellingShingle | Nuclear physics and atomic energy V. Y. Suhakov A. A. Cherniuk Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title | Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_full | Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_fullStr | Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_full_unstemmed | Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_short | Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| title_sort | distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000745612 |
| work_keys_str_mv | AT vysuhakov distributionofconcentrationofimpuritiesandampquotimpurityvacancyampquotcomplexesbeyondtherangeofionsduringimplantation AT aacherniuk distributionofconcentrationofimpuritiesandampquotimpurityvacancyampquotcomplexesbeyondtherangeofionsduringimplantation |