Distribution of concentration of impurities and "impurity–vacancy" complexes beyond the range of ions during implantation
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| Date: | 2017 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2017
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| Series: | Nuclear physics and atomic energy |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000745612 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |