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Distribution of concentration of impurities and &quot;impurity–vacancy&quot; complexes beyond the range of ions during implantation

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Bibliographic Details
Date:	2017
Main Authors:	V. Y. Suhakov, A. A. Cherniuk
Format:	Article
Language:	English
Published:	2017
Series:	Nuclear physics and atomic energy
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000745612
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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