The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method
Збережено в:
| Дата: | 2017 |
|---|---|
| Автори: | , , , , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2017
|
| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000778507 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859509433638322176 |
|---|---|
| author | A. I. Ievtushenko M. G. Dusheyko V. A. Karpyna O. I. Bykov P. M. Lytvyn O. I. Olifan V. A. Levchenko A. A. Korchovyi S. P. Starik S. V. Tkach E. F. Kuzmenko G. V. Lashkarev |
| author_facet | A. I. Ievtushenko M. G. Dusheyko V. A. Karpyna O. I. Bykov P. M. Lytvyn O. I. Olifan V. A. Levchenko A. A. Korchovyi S. P. Starik S. V. Tkach E. F. Kuzmenko G. V. Lashkarev |
| author_sort | A. I. Ievtushenko |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:57:35Z |
| format | Article |
| id | open-sciencenbuvgovua-38396 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:57:35Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-383962024-02-29T11:41:15Z The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method A. I. Ievtushenko M. G. Dusheyko V. A. Karpyna O. I. Bykov P. M. Lytvyn O. I. Olifan V. A. Levchenko A. A. Korchovyi S. P. Starik S. V. Tkach E. F. Kuzmenko G. V. Lashkarev 1560-8034 2017 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000778507 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. I. Ievtushenko M. G. Dusheyko V. A. Karpyna O. I. Bykov P. M. Lytvyn O. I. Olifan V. A. Levchenko A. A. Korchovyi S. P. Starik S. V. Tkach E. F. Kuzmenko G. V. Lashkarev The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method |
| title | The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method |
| title_full | The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method |
| title_fullStr | The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method |
| title_full_unstemmed | The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method |
| title_short | The influence of substrate temperature on properties of Cu-Al-O films deposited using the reactive ion beam sputtering method |
| title_sort | influence of substrate temperature on properties of cu-al-o films deposited using the reactive ion beam sputtering method |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000778507 |
| work_keys_str_mv | AT aiievtushenko theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT mgdusheyko theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT vakarpyna theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT oibykov theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT pmlytvyn theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT oiolifan theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT valevchenko theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT aakorchovyi theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT spstarik theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT svtkach theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT efkuzmenko theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT gvlashkarev theinfluenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT aiievtushenko influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT mgdusheyko influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT vakarpyna influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT oibykov influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT pmlytvyn influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT oiolifan influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT valevchenko influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT aakorchovyi influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT spstarik influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT svtkach influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT efkuzmenko influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod AT gvlashkarev influenceofsubstratetemperatureonpropertiesofcualofilmsdepositedusingthereactiveionbeamsputteringmethod |