In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing
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| Datum: | 2017 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2017
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000850183 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859510350361133056 |
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| author | Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej |
| author_facet | Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej |
| author_sort | Ju. D. Filatov |
| collection | Open-Science |
| first_indexed | 2025-07-17T20:02:45Z |
| format | Article |
| id | open-sciencenbuvgovua-41980 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T20:02:45Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-419802024-02-29T11:56:47Z In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej 0203-3119 2017 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000850183 Article |
| spellingShingle | Superhard Materials Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title | In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_full | In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_fullStr | In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_full_unstemmed | In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_short | In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_sort | in-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000850183 |
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