In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing
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| Datum: | 2017 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2017
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000850183 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-419802024-02-29T11:56:47Z In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej 0203-3119 2017 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000850183 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| format |
Article |
| author |
Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej |
| author_facet |
Ju. D. Filatov V. I. Sidorko S. V. Kovalev Ju. Filatov G. Montej |
| author_sort |
Ju. D. Filatov |
| title |
In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_short |
In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_full |
In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_fullStr |
In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_full_unstemmed |
In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| title_sort |
in-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing |
| publishDate |
2017 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000850183 |
| work_keys_str_mv |
AT judfilatov inprocessmonitoringofshapeaccuracyofflatsurfacesofopticalandmicroelectroniccomponentsinpolishing AT visidorko inprocessmonitoringofshapeaccuracyofflatsurfacesofopticalandmicroelectroniccomponentsinpolishing AT svkovalev inprocessmonitoringofshapeaccuracyofflatsurfacesofopticalandmicroelectroniccomponentsinpolishing AT jufilatov inprocessmonitoringofshapeaccuracyofflatsurfacesofopticalandmicroelectroniccomponentsinpolishing AT gmontej inprocessmonitoringofshapeaccuracyofflatsurfacesofopticalandmicroelectroniccomponentsinpolishing |
| first_indexed |
2025-07-17T20:02:45Z |
| last_indexed |
2025-07-17T20:02:45Z |
| _version_ |
1850415551279529984 |