APA (7th ed.) Citation

Deng, F., Hao, C., Guo, Z., Wang, S., Bo, X., & Lei, Q. (2021). Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing.

Chicago Style (17th ed.) Citation

Deng, F., C. Hao, Zh Guo, Sh Wang, X. Bo, and Q. Lei. Simulation Study on Airflow Field Uniformity of HFCVD Deposition System by Filament Spacing. 2021.

MLA (8th ed.) Citation

Deng, F., et al. Simulation Study on Airflow Field Uniformity of HFCVD Deposition System by Filament Spacing. 2021.

Warning: These citations may not always be 100% accurate.