Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
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| Datum: | 2021 |
|---|---|
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2021
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-46742024-02-25T16:04:19Z Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei 0203-3119 2021 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001235610 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| format |
Article |
| author |
F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
| author_facet |
F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
| author_sort |
F. Deng |
| title |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_short |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_full |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_fullStr |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_full_unstemmed |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_sort |
simulation study on airflow field uniformity of hfcvd deposition system by filament spacing |
| publishDate |
2021 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
| work_keys_str_mv |
AT fdeng simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT chao simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT zhguo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT shwang simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT xbo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT qlei simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing |
| first_indexed |
2025-07-17T11:06:26Z |
| last_indexed |
2025-07-17T11:06:26Z |
| _version_ |
1850411130024886272 |