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Precision shaping flat surfaces details of optics and microelectronics when polishing

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Bibliographische Detailangaben
Datum:	2016
Hauptverfasser:	Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	2016
Schriftenreihe:	Tooling materials science
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000713088
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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