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Precision shaping flat surfaces details of optics and microelectronics when polishing

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Bibliographic Details
Date:	2016
Main Authors:	Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Format:	Article
Language:	English
Published:	2016
Series:	Tooling materials science
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000713088
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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