Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
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| Datum: | 2016 |
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| Format: | Artikel |
| Sprache: | English |
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2016
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| Schriftenreihe: | Ukrainian journal of physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000727569 |
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open-sciencenbuvgovua-523962024-02-29T13:06:21Z Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering V. I. Popovych A. I. Ievtushenko O. S. Lytvyn V. R. Romanjuk V. M. Tkach V. A. Baturyn O. Y. Karpenko M. V. Dranchuk L. O. Klochkov M. G. Dushejko V. A. Karpyna G. V. Lashkarov 2071-0186 2016 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000727569 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics V. I. Popovych A. I. Ievtushenko O. S. Lytvyn V. R. Romanjuk V. M. Tkach V. A. Baturyn O. Y. Karpenko M. V. Dranchuk L. O. Klochkov M. G. Dushejko V. A. Karpyna G. V. Lashkarov Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| format |
Article |
| author |
V. I. Popovych A. I. Ievtushenko O. S. Lytvyn V. R. Romanjuk V. M. Tkach V. A. Baturyn O. Y. Karpenko M. V. Dranchuk L. O. Klochkov M. G. Dushejko V. A. Karpyna G. V. Lashkarov |
| author_facet |
V. I. Popovych A. I. Ievtushenko O. S. Lytvyn V. R. Romanjuk V. M. Tkach V. A. Baturyn O. Y. Karpenko M. V. Dranchuk L. O. Klochkov M. G. Dushejko V. A. Karpyna G. V. Lashkarov |
| author_sort |
V. I. Popovych |
| title |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_short |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_full |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_fullStr |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_full_unstemmed |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_sort |
effect of argon deposition pressure on the properties of aluminum-doped zno films deposited layer-by-layer using magnetron sputtering |
| publishDate |
2016 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000727569 |
| work_keys_str_mv |
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| first_indexed |
2025-07-17T23:02:35Z |
| last_indexed |
2025-07-17T23:02:35Z |
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