Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2015
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000353228 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859520006365118464 |
|---|---|
| author | T. S. Rozouvan L. V. Poperenko I. A. Shaykevich |
| author_facet | T. S. Rozouvan L. V. Poperenko I. A. Shaykevich |
| author_sort | T. S. Rozouvan |
| collection | Open-Science |
| first_indexed | 2025-07-18T00:50:58Z |
| format | Article |
| id | open-sciencenbuvgovua-57383 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-18T00:50:58Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-573832024-04-16T12:33:29Z Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique T. S. Rozouvan L. V. Poperenko I. A. Shaykevich 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000353228 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics T. S. Rozouvan L. V. Poperenko I. A. Shaykevich Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_full | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_fullStr | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_full_unstemmed | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_short | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_sort | influence of the surface roughness and oxide surface layer onto si optical constants measured by the ellipsometry technique |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000353228 |
| work_keys_str_mv | AT tsrozouvan influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique AT lvpoperenko influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique AT iashaykevich influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique |