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Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique

Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique

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Bibliographic Details
Main Authors: T. S. Rozouvan, L. V. Poperenko, I. A. Shaykevich
Format: Article
Language:English
Published: 2015
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000353228
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id open-sciencenbuvgovua-57383
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spelling open-sciencenbuvgovua-573832024-04-16T12:33:29Z Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique T. S. Rozouvan L. V. Poperenko I. A. Shaykevich 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000353228 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
T. S. Rozouvan
L. V. Poperenko
I. A. Shaykevich
Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
format Article
author T. S. Rozouvan
L. V. Poperenko
I. A. Shaykevich
author_facet T. S. Rozouvan
L. V. Poperenko
I. A. Shaykevich
author_sort T. S. Rozouvan
title Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
title_short Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
title_full Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
title_fullStr Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
title_full_unstemmed Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
title_sort influence of the surface roughness and oxide surface layer onto si optical constants measured by the ellipsometry technique
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0000353228
work_keys_str_mv AT tsrozouvan influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique
AT lvpoperenko influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique
AT iashaykevich influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique
first_indexed 2024-04-17T04:12:11Z
last_indexed 2024-04-17T04:12:11Z
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