Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique
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| Datum: | 2015 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2015
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000353228 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859520006365118464 |
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| author | T. S. Rozouvan L. V. Poperenko I. A. Shaykevich |
| author_facet | T. S. Rozouvan L. V. Poperenko I. A. Shaykevich |
| author_sort | T. S. Rozouvan |
| collection | Open-Science |
| first_indexed | 2025-07-18T00:50:58Z |
| format | Article |
| id | open-sciencenbuvgovua-57383 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-18T00:50:58Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-573832024-04-16T12:33:29Z Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique T. S. Rozouvan L. V. Poperenko I. A. Shaykevich 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000353228 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics T. S. Rozouvan L. V. Poperenko I. A. Shaykevich Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_full | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_fullStr | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_full_unstemmed | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_short | Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique |
| title_sort | influence of the surface roughness and oxide surface layer onto si optical constants measured by the ellipsometry technique |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000353228 |
| work_keys_str_mv | AT tsrozouvan influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique AT lvpoperenko influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique AT iashaykevich influenceofthesurfaceroughnessandoxidesurfacelayerontosiopticalconstantsmeasuredbytheellipsometrytechnique |