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Influence of the surface roughness and oxide surface layer onto Si optical constants measured by the ellipsometry technique

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Bibliographic Details
Date:	2015
Main Authors:	T. S. Rozouvan, L. V. Poperenko, I. A. Shaykevich
Format:	Article
Language:	English
Published:	2015
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000353228
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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