Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films
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| Date: | 2015 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2015
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| Series: | Nanosystems, nanomaterials, nanotechnologies |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000454323 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859521870052720640 |
|---|---|
| author | O. K. Porada |
| author_facet | O. K. Porada |
| author_sort | O. K. Porada |
| collection | Open-Science |
| first_indexed | 2025-07-18T01:53:43Z |
| format | Article |
| id | open-sciencenbuvgovua-60113 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-18T01:53:43Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Nanosystems, nanomaterials, nanotechnologies |
| spelling | open-sciencenbuvgovua-601132024-04-16T12:48:00Z Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films O. K. Porada 1816-5230 2015 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000454323 Article |
| spellingShingle | Nanosystems, nanomaterials, nanotechnologies O. K. Porada Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title | Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_full | Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_fullStr | Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_full_unstemmed | Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_short | Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_sort | influence of conditions of deposition and annealing on a nanohardness of amorphous si–c–n films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000454323 |
| work_keys_str_mv | AT okporada influenceofconditionsofdepositionandannealingonananohardnessofamorphoussicnfilms |