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Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films

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Bibliographic Details
Date:	2015
Main Author:	O. K. Porada
Format:	Article
Language:	English
Published:	2015
Series:	Nanosystems, nanomaterials, nanotechnologies
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000454323
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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