Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2015
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| Schriftenreihe: | Metallophysics and advanced technologies |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000551437 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-633812024-04-16T13:07:02Z Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus 1024-1809 2015 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000551437 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Metallophysics and advanced technologies |
| spellingShingle |
Metallophysics and advanced technologies M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| format |
Article |
| author |
M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus |
| author_facet |
M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus |
| author_sort |
M. V. Maleev |
| title |
Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_short |
Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_full |
Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_fullStr |
Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_full_unstemmed |
Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_sort |
physical mechanisms of sio2 target sputtering with accelerated ions of c60 |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000551437 |
| work_keys_str_mv |
AT mvmaleev physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT enzubarev physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT vepukha physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT androzdov physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT asvus physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 |
| first_indexed |
2025-07-18T03:22:00Z |
| last_indexed |
2025-07-18T03:22:00Z |
| _version_ |
1850417901461307392 |