Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60
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| Date: | 2015 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2015
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| Series: | Metallophysics and advanced technologies |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000551437 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859524283477262336 |
|---|---|
| author | M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus |
| author_facet | M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus |
| author_sort | M. V. Maleev |
| collection | Open-Science |
| first_indexed | 2025-07-18T03:22:00Z |
| format | Article |
| id | open-sciencenbuvgovua-63381 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-18T03:22:00Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Metallophysics and advanced technologies |
| spelling | open-sciencenbuvgovua-633812024-04-16T13:07:02Z Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus 1024-1809 2015 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000551437 Article |
| spellingShingle | Metallophysics and advanced technologies M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title | Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_full | Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_fullStr | Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_full_unstemmed | Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_short | Physical Mechanisms of SiO2 Target Sputtering with Accelerated Ions of C60 |
| title_sort | physical mechanisms of sio2 target sputtering with accelerated ions of c60 |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000551437 |
| work_keys_str_mv | AT mvmaleev physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT enzubarev physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT vepukha physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT androzdov physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 AT asvus physicalmechanismsofsio2targetsputteringwithacceleratedionsofc60 |