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Polishing of opto-electronic equipment elements from single-crystal silicon carbide

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Bibliographic Details
Date:	2015
Main Authors:	Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij
Format:	Article
Language:	English
Published:	2015
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000694060
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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