Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
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| Date: | 2015 |
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| Main Authors: | , , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2015
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000694123 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |