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Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering

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Bibliographic Details
Date:	2015
Main Authors:	A. O. Kozak, V. I. Ivashchenko, O. K. Porada, L. A. Ivashchenko, O. K. Synelnychenko, S. M. Dub, O. S. Lytvyn, I. I. Tymofieieva, H. M. Tolmacheva
Format:	Article
Language:	English
Published:	2015
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000694123
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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