Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
Збережено в:
| Дата: | 2015 |
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| Автори: | , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2015
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| Назва видання: | Optoelectronics and Semiconductor Technique |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001061487 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859527630258176000 |
|---|---|
| author | V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi |
| author_facet | V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi |
| author_sort | V. A. Danko |
| collection | Open-Science |
| first_indexed | 2025-07-22T05:55:40Z |
| format | Article |
| id | open-sciencenbuvgovua-68460 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T05:55:40Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Optoelectronics and Semiconductor Technique |
| spelling | open-sciencenbuvgovua-684602024-04-16T13:34:24Z Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi 2707-6806 2015 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0001061487 Article |
| spellingShingle | Optoelectronics and Semiconductor Technique V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title | Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_full | Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_fullStr | Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_full_unstemmed | Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_short | Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_sort | formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001061487 |
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