Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
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| Дата: | 2015 |
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| Автори: | , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
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| Назва видання: | Optoelectronics and Semiconductor Technique |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001061487 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-68460 |
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open-sciencenbuvgovua-684602024-04-16T13:34:24Z Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi 2707-6806 2015 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0001061487 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Optoelectronics and Semiconductor Technique |
| spellingShingle |
Optoelectronics and Semiconductor Technique V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| format |
Article |
| author |
V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi |
| author_facet |
V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi |
| author_sort |
V. A. Danko |
| title |
Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_short |
Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_full |
Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_fullStr |
Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_full_unstemmed |
Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| title_sort |
formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001061487 |
| work_keys_str_mv |
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| first_indexed |
2024-04-17T04:57:10Z |
| last_indexed |
2024-04-17T04:57:10Z |
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