Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
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| Дата: | 2014 |
|---|---|
| Автори: | , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2014
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000352938 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859529762581512192 |
|---|---|
| author | O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk |
| author_facet | O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk |
| author_sort | O. V. Steblova |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:03:43Z |
| format | Article |
| id | open-sciencenbuvgovua-72724 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:03:43Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-727242024-04-16T17:08:58Z Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352938 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_full | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_fullStr | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_full_unstemmed | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_short | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_sort | transformation of siox films into nanocomposite sio2(si) films under thermal and laser annealing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000352938 |
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