Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
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| Datum: | 2014 |
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| Hauptverfasser: | , , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2014
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000352938 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-727242024-04-16T17:08:58Z Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352938 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| format |
Article |
| author |
O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk |
| author_facet |
O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk |
| author_sort |
O. V. Steblova |
| title |
Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_short |
Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_full |
Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_fullStr |
Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_full_unstemmed |
Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_sort |
transformation of siox films into nanocomposite sio2(si) films under thermal and laser annealing |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000352938 |
| work_keys_str_mv |
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| first_indexed |
2025-07-22T07:03:43Z |
| last_indexed |
2025-07-22T07:03:43Z |
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