Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing

Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing

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Bibliographic Details
Date:2014
Main Authors: O. V. Steblova, A. A. Evtukh, O. L. Bratus, L. L. Fedorenko, M. V. Voitovych, O. S. Lytvyn, O. O. Gavrylyuk, Yu. Semchuk
Format: Article
Language:English
Published: 2014
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000352938
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-72724
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spelling open-sciencenbuvgovua-727242024-04-16T17:08:58Z Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352938 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
O. V. Steblova
A. A. Evtukh
O. L. Bratus
L. L. Fedorenko
M. V. Voitovych
O. S. Lytvyn
O. O. Gavrylyuk
Yu. Semchuk
Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
format Article
author O. V. Steblova
A. A. Evtukh
O. L. Bratus
L. L. Fedorenko
M. V. Voitovych
O. S. Lytvyn
O. O. Gavrylyuk
Yu. Semchuk
author_facet O. V. Steblova
A. A. Evtukh
O. L. Bratus
L. L. Fedorenko
M. V. Voitovych
O. S. Lytvyn
O. O. Gavrylyuk
Yu. Semchuk
author_sort O. V. Steblova
title Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
title_short Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
title_full Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
title_fullStr Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
title_full_unstemmed Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
title_sort transformation of siox films into nanocomposite sio2(si) films under thermal and laser annealing
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0000352938
work_keys_str_mv AT ovsteblova transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT aaevtukh transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT olbratus transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT llfedorenko transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT mvvoitovych transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT oslytvyn transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT oogavrylyuk transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
AT yusemchuk transformationofsioxfilmsintonanocompositesio2sifilmsunderthermalandlaserannealing
first_indexed 2025-07-22T07:03:43Z
last_indexed 2025-07-22T07:03:43Z
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