Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing
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| Date: | 2014 |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2014
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000352938 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859529762581512192 |
|---|---|
| author | O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk |
| author_facet | O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk |
| author_sort | O. V. Steblova |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:03:43Z |
| format | Article |
| id | open-sciencenbuvgovua-72724 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:03:43Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-727242024-04-16T17:08:58Z Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352938 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. V. Steblova A. A. Evtukh O. L. Bratus L. L. Fedorenko M. V. Voitovych O. S. Lytvyn O. O. Gavrylyuk Yu. Semchuk Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_full | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_fullStr | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_full_unstemmed | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_short | Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing |
| title_sort | transformation of siox films into nanocomposite sio2(si) films under thermal and laser annealing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000352938 |
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