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Development of deep silicon plasma etching for 3D integration technology

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Bibliographic Details
Date:	2014
Main Authors:	A. A. Golishnikov, M. G. Putrja
Format:	Article
Language:	English
Published:	2014
Series:	Technology and design in electronic equipment
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000405244
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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