Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
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| Datum: | 2014 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2014
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| Schriftenreihe: | Metallophysics and advanced technologies |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000526183 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859532281844072448 |
|---|---|
| author | K. V. Kirpenko A. V. Nedolja I. N. Titov |
| author_facet | K. V. Kirpenko A. V. Nedolja I. N. Titov |
| author_sort | K. V. Kirpenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:50:00Z |
| format | Article |
| id | open-sciencenbuvgovua-75899 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:50:00Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Metallophysics and advanced technologies |
| spelling | open-sciencenbuvgovua-758992024-04-16T17:30:44Z Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation K. V. Kirpenko A. V. Nedolja I. N. Titov 1024-1809 2014 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000526183 Article |
| spellingShingle | Metallophysics and advanced technologies K. V. Kirpenko A. V. Nedolja I. N. Titov Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title | Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_full | Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_fullStr | Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_full_unstemmed | Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_short | Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_sort | determination of conditions for transition-metals' deposition from their carbonyls by means of the lcvd-process simulation |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000526183 |
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