Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation

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Дата:2014
Автори: K. V. Kirpenko, A. V. Nedolja, I. N. Titov
Формат: Стаття
Мова:English
Опубліковано: 2014
Назва видання:Metallophysics and advanced technologies
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000526183
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-75899
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spelling open-sciencenbuvgovua-758992024-04-16T17:30:44Z Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation K. V. Kirpenko A. V. Nedolja I. N. Titov 1024-1809 2014 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000526183 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Metallophysics and advanced technologies
spellingShingle Metallophysics and advanced technologies
K. V. Kirpenko
A. V. Nedolja
I. N. Titov
Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
format Article
author K. V. Kirpenko
A. V. Nedolja
I. N. Titov
author_facet K. V. Kirpenko
A. V. Nedolja
I. N. Titov
author_sort K. V. Kirpenko
title Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
title_short Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
title_full Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
title_fullStr Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
title_full_unstemmed Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
title_sort determination of conditions for transition-metals' deposition from their carbonyls by means of the lcvd-process simulation
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0000526183
work_keys_str_mv AT kvkirpenko determinationofconditionsfortransitionmetals039depositionfromtheircarbonylsbymeansofthelcvdprocesssimulation
AT avnedolja determinationofconditionsfortransitionmetals039depositionfromtheircarbonylsbymeansofthelcvdprocesssimulation
AT intitov determinationofconditionsfortransitionmetals039depositionfromtheircarbonylsbymeansofthelcvdprocesssimulation
first_indexed 2025-07-22T07:50:00Z
last_indexed 2025-07-22T07:50:00Z
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