Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
Saved in:
| Date: | 2014 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2014
|
| Series: | Metallophysics and advanced technologies |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000526183 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-75899 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-758992024-04-16T17:30:44Z Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation K. V. Kirpenko A. V. Nedolja I. N. Titov 1024-1809 2014 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000526183 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Metallophysics and advanced technologies |
| spellingShingle |
Metallophysics and advanced technologies K. V. Kirpenko A. V. Nedolja I. N. Titov Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| format |
Article |
| author |
K. V. Kirpenko A. V. Nedolja I. N. Titov |
| author_facet |
K. V. Kirpenko A. V. Nedolja I. N. Titov |
| author_sort |
K. V. Kirpenko |
| title |
Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_short |
Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_full |
Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_fullStr |
Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_full_unstemmed |
Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation |
| title_sort |
determination of conditions for transition-metals' deposition from their carbonyls by means of the lcvd-process simulation |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000526183 |
| work_keys_str_mv |
AT kvkirpenko determinationofconditionsfortransitionmetals039depositionfromtheircarbonylsbymeansofthelcvdprocesssimulation AT avnedolja determinationofconditionsfortransitionmetals039depositionfromtheircarbonylsbymeansofthelcvdprocesssimulation AT intitov determinationofconditionsfortransitionmetals039depositionfromtheircarbonylsbymeansofthelcvdprocesssimulation |
| first_indexed |
2025-07-22T07:50:00Z |
| last_indexed |
2025-07-22T07:50:00Z |
| _version_ |
1850419282539708416 |