Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation

Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation

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Bibliographische Detailangaben
Datum:	2014
Hauptverfasser:	K. V. Kirpenko, A. V. Nedolja, I. N. Titov
Format:	Artikel
Sprache:	English
Veröffentlicht:	2014
Schriftenreihe:	Metallophysics and advanced technologies
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000526183
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Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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