Low-temperature deposition of silicon dioxide films in high-density plasma
Gespeichert in:
| Datum: | 2013 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2013
|
| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000351896 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859538684156575744 |
|---|---|
| author | A. Yasunas D. Kotov V. Shiripov U. Radzionay |
| author_facet | A. Yasunas D. Kotov V. Shiripov U. Radzionay |
| author_sort | A. Yasunas |
| collection | Open-Science |
| first_indexed | 2025-07-22T10:04:53Z |
| format | Article |
| id | open-sciencenbuvgovua-83792 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T10:04:53Z |
| publishDate | 2013 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-837922024-04-16T18:34:28Z Low-temperature deposition of silicon dioxide films in high-density plasma A. Yasunas D. Kotov V. Shiripov U. Radzionay 1560-8034 2013 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000351896 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. Yasunas D. Kotov V. Shiripov U. Radzionay Low-temperature deposition of silicon dioxide films in high-density plasma |
| title | Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_full | Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_fullStr | Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_full_unstemmed | Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_short | Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_sort | low-temperature deposition of silicon dioxide films in high-density plasma |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000351896 |
| work_keys_str_mv | AT ayasunas lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma AT dkotov lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma AT vshiripov lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma AT uradzionay lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma |