Low-temperature deposition of silicon dioxide films in high-density plasma
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| Datum: | 2013 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2013
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000351896 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-837922024-04-16T18:34:28Z Low-temperature deposition of silicon dioxide films in high-density plasma A. Yasunas D. Kotov V. Shiripov U. Radzionay 1560-8034 2013 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000351896 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics A. Yasunas D. Kotov V. Shiripov U. Radzionay Low-temperature deposition of silicon dioxide films in high-density plasma |
| format |
Article |
| author |
A. Yasunas D. Kotov V. Shiripov U. Radzionay |
| author_facet |
A. Yasunas D. Kotov V. Shiripov U. Radzionay |
| author_sort |
A. Yasunas |
| title |
Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_short |
Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_full |
Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_fullStr |
Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_full_unstemmed |
Low-temperature deposition of silicon dioxide films in high-density plasma |
| title_sort |
low-temperature deposition of silicon dioxide films in high-density plasma |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000351896 |
| work_keys_str_mv |
AT ayasunas lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma AT dkotov lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma AT vshiripov lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma AT uradzionay lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma |
| first_indexed |
2025-07-22T10:04:53Z |
| last_indexed |
2025-07-22T10:04:53Z |
| _version_ |
1850420140889341952 |