Low-temperature deposition of silicon dioxide films in high-density plasma

Low-temperature deposition of silicon dioxide films in high-density plasma

Saved in:
Bibliographic Details
Date:2013
Main Authors: A. Yasunas, D. Kotov, V. Shiripov, U. Radzionay
Format: Article
Language:English
Published: 2013
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000351896
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-83792
record_format dspace
spelling open-sciencenbuvgovua-837922024-04-16T18:34:28Z Low-temperature deposition of silicon dioxide films in high-density plasma A. Yasunas D. Kotov V. Shiripov U. Radzionay 1560-8034 2013 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000351896 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
A. Yasunas
D. Kotov
V. Shiripov
U. Radzionay
Low-temperature deposition of silicon dioxide films in high-density plasma
format Article
author A. Yasunas
D. Kotov
V. Shiripov
U. Radzionay
author_facet A. Yasunas
D. Kotov
V. Shiripov
U. Radzionay
author_sort A. Yasunas
title Low-temperature deposition of silicon dioxide films in high-density plasma
title_short Low-temperature deposition of silicon dioxide films in high-density plasma
title_full Low-temperature deposition of silicon dioxide films in high-density plasma
title_fullStr Low-temperature deposition of silicon dioxide films in high-density plasma
title_full_unstemmed Low-temperature deposition of silicon dioxide films in high-density plasma
title_sort low-temperature deposition of silicon dioxide films in high-density plasma
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000351896
work_keys_str_mv AT ayasunas lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma
AT dkotov lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma
AT vshiripov lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma
AT uradzionay lowtemperaturedepositionofsilicondioxidefilmsinhighdensityplasma
first_indexed 2025-07-22T10:04:53Z
last_indexed 2025-07-22T10:04:53Z
_version_ 1850420140889341952

Similar Items