About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation

About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation

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Bibliographic Details
Date:2013
Main Author: Ya. M. Olikh
Format: Article
Language:English
Published: 2013
Series:Optoelectronics and Semiconductor Technique
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000363128
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-842522024-04-16T18:37:13Z About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation Ya. M. Olikh 2707-6806 2013 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0000363128 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Optoelectronics and Semiconductor Technique
spellingShingle Optoelectronics and Semiconductor Technique
Ya. M. Olikh
About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
format Article
author Ya. M. Olikh
author_facet Ya. M. Olikh
author_sort Ya. M. Olikh
title About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
title_short About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
title_full About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
title_fullStr About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
title_full_unstemmed About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
title_sort about ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000363128
work_keys_str_mv AT yamolikh aboutultrasoundstimulatedaselforganizationofdefectstructuresinsemiconductorsduringionimplantation
first_indexed 2025-07-22T10:14:49Z
last_indexed 2025-07-22T10:14:49Z
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