Pilipenko, V. A., Gorushko, V. A., Petlitskij, A. N., Ponarjadov, V. V., Turtsevich, A. S., & Shvedov, S. V. (2013). Methods and mechanisms of gettering of silicon structures in the production of integrated circuits.
Chicago Style (17th ed.) CitationPilipenko, V. A., V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, and S. V. Shvedov. Methods and Mechanisms of Gettering of Silicon Structures in the Production of Integrated Circuits. 2013.
MLA (8th ed.) CitationPilipenko, V. A., et al. Methods and Mechanisms of Gettering of Silicon Structures in the Production of Integrated Circuits. 2013.
Warning: These citations may not always be 100% accurate.