Pilipenko, V. A., Gorushko, V. A., Petlitskij, A. N., Ponarjadov, V. V., Turtsevich, A. S., & Shvedov, S. V. (2013). Methods and mechanisms of gettering of silicon structures in the production of integrated circuits.
Chicago-Zitierstil (17. Ausg.)Pilipenko, V. A., V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, und S. V. Shvedov. Methods and Mechanisms of Gettering of Silicon Structures in the Production of Integrated Circuits. 2013.
MLA-Zitierstil (8. Ausg.)Pilipenko, V. A., et al. Methods and Mechanisms of Gettering of Silicon Structures in the Production of Integrated Circuits. 2013.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.