Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching
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| Date: | 2013 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000405176 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859539259754545152 |
|---|---|
| author | I. R. Jatsunskij |
| author_facet | I. R. Jatsunskij |
| author_sort | I. R. Jatsunskij |
| collection | Open-Science |
| first_indexed | 2025-07-22T10:20:32Z |
| format | Article |
| id | open-sciencenbuvgovua-84532 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T10:20:32Z |
| publishDate | 2013 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-845322024-04-16T18:39:21Z Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching I. R. Jatsunskij 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405176 Article |
| spellingShingle | Technology and design in electronic equipment I. R. Jatsunskij Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title | Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_full | Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_fullStr | Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_full_unstemmed | Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_short | Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching |
| title_sort | obtaining porous silicon suitable for sensor technology using macetch nonelectrolytic etching |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000405176 |
| work_keys_str_mv | AT irjatsunskij obtainingporoussiliconsuitableforsensortechnologyusingmacetchnonelectrolyticetching |