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Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods

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Bibliographic Details
Date:	2013
Main Authors:	N. A. Vasilenko, A. O. Vasilenko
Format:	Article
Language:	English
Published:	2013
Series:	Journal of mechanical engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000450102
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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