Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
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| Дата: | 2013 |
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| Автори: | , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2013
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| Назва видання: | Metallophysics and advanced technologies |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000521434 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-85915 |
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open-sciencenbuvgovua-859152024-04-16T18:48:50Z Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles Ju. P. Pershin V. A. Sevrjukova E. N. Zubarev A. S. Oberemok V. P. Melnik B. N. Romanjuk V. G. Popov P. M. Litvin 1024-1809 2013 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000521434 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Metallophysics and advanced technologies |
| spellingShingle |
Metallophysics and advanced technologies Ju. P. Pershin V. A. Sevrjukova E. N. Zubarev A. S. Oberemok V. P. Melnik B. N. Romanjuk V. G. Popov P. M. Litvin Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles |
| format |
Article |
| author |
Ju. P. Pershin V. A. Sevrjukova E. N. Zubarev A. S. Oberemok V. P. Melnik B. N. Romanjuk V. G. Popov P. M. Litvin |
| author_facet |
Ju. P. Pershin V. A. Sevrjukova E. N. Zubarev A. S. Oberemok V. P. Melnik B. N. Romanjuk V. G. Popov P. M. Litvin |
| author_sort |
Ju. P. Pershin |
| title |
Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles |
| title_short |
Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles |
| title_full |
Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles |
| title_fullStr |
Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles |
| title_full_unstemmed |
Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles |
| title_sort |
investigation of the phase interfaces in periodic multilayer mo/si structures, using the method of mass-spectrometry of neutral particles |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000521434 |
| work_keys_str_mv |
AT juppershin investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT vasevrjukova investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT enzubarev investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT asoberemok investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT vpmelnik investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT bnromanjuk investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT vgpopov investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles AT pmlitvin investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles |
| first_indexed |
2024-04-17T06:08:11Z |
| last_indexed |
2024-04-17T06:08:11Z |
| _version_ |
1796886243569565696 |