Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles

Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles

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Bibliographic Details
Date:2013
Main Authors: Ju. P. Pershin, V. A. Sevrjukova, E. N. Zubarev, A. S. Oberemok, V. P. Melnik, B. N. Romanjuk, V. G. Popov, P. M. Litvin
Format: Article
Language:English
Published: 2013
Series:Metallophysics and advanced technologies
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000521434
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-85915
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spelling open-sciencenbuvgovua-859152024-04-16T18:48:50Z Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles Ju. P. Pershin V. A. Sevrjukova E. N. Zubarev A. S. Oberemok V. P. Melnik B. N. Romanjuk V. G. Popov P. M. Litvin 1024-1809 2013 en Metallophysics and advanced technologies http://jnas.nbuv.gov.ua/article/UJRN-0000521434 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Metallophysics and advanced technologies
spellingShingle Metallophysics and advanced technologies
Ju. P. Pershin
V. A. Sevrjukova
E. N. Zubarev
A. S. Oberemok
V. P. Melnik
B. N. Romanjuk
V. G. Popov
P. M. Litvin
Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
format Article
author Ju. P. Pershin
V. A. Sevrjukova
E. N. Zubarev
A. S. Oberemok
V. P. Melnik
B. N. Romanjuk
V. G. Popov
P. M. Litvin
author_facet Ju. P. Pershin
V. A. Sevrjukova
E. N. Zubarev
A. S. Oberemok
V. P. Melnik
B. N. Romanjuk
V. G. Popov
P. M. Litvin
author_sort Ju. P. Pershin
title Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
title_short Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
title_full Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
title_fullStr Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
title_full_unstemmed Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles
title_sort investigation of the phase interfaces in periodic multilayer mo/si structures, using the method of mass-spectrometry of neutral particles
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000521434
work_keys_str_mv AT juppershin investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT vasevrjukova investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT enzubarev investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT asoberemok investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT vpmelnik investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT bnromanjuk investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT vgpopov investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
AT pmlitvin investigationofthephaseinterfacesinperiodicmultilayermosistructuresusingthemethodofmassspectrometryofneutralparticles
first_indexed 2025-07-22T10:48:27Z
last_indexed 2025-07-22T10:48:27Z
_version_ 1850420375007002624

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